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NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 38614-2020

Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator

Issued Date:

Implemented Date:

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 38614-2020
Standard Category	China National Standards
GB Standard English Title	Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator
GB Standard Chinese Title	基于柔性铰链机构和压电陶瓷驱动器的纳米定位与扫描平台测量方法
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